MNMS Cleanroom

Lithography side

Wet benches and photolithography under filtered light


Contact lithography up to 0.5um resolution

MNMS Cleanroom

Photolithography in Class100 Cleanroom

About the Micro-Nano-Mechanical Systems Cleanroom Laboratory

The Micro-Nano-Mechanical Systems Cleanroom Laboratory within the Department of Mechanical Science and Engineering at the University of Illinois provides an opportunity for research and discovery that is otherwise unattainable in a typical laboratory setting. If you have any questions or concerns, please email the MNMS Director ( 

To request staff assisted Cleanroom services and research, contact Sr Research Engineer, Joe Maduzia, at or 217-333-5694.

Check out our Wiki page

Description of Services

MNMS Cleanroom Staff are available for device fabrication research and development. This can include fabrication approach suggestions, or direct manufacturing and testing. The majority of fabrication done by Staff is done using MNMS Cleanroom Equipment, however the Staff will use other equipment on campus as necessary.

Description of Facilities

The Micro-Nano Mechanical Systems (MNMS) Laboratory is a 3800 sq. ft suite of labs and related support rooms, including 3 cleanroom laboratories for research in the design and fabrication of small-scale mechanical systems. The lab supports research and instruction in the general area of micro- and nano-electro-mechanical systems (MEMS & NEMS), and nano-chemical-electrical-mechanical-manufacturing systems (Nano-CEMMS). The current focus is on devices employing nano-to-microscale mechanisms and the integration of these mechanisms into meso-scale devices.

The MNMS laboratory has class 1000, 100 and 10 cleanrooms for the microfabrication, inspection, and testing of devices. The cleanrooms house a range of state-of-the-art equipment including:


In addition to the cleanroom laboratories, the MNMS laboratory has a preparation room for lapping, dicing, ultrasonic milling, and sample preparation. A chemical fume hood and Scanning Electron Microscope (SEM) are also available.

MNMS Cleanroom Contacts

MNMS Cleanroom
2208 Sidney Lu Mechanical Engineering Building
1206 W Green St
Urbana, IL 61801