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The Micro-Nano-Mechanical Systems Cleanroom Laboratory within the Department of Mechanical Science and Engineering at the University of Illinois provides an opportunity for research and discovery that is otherwise unattainable in a typical laboratory setting. Publications listed below contain work completed in part at this Laboratory.

To properly cite MNMS Cleanroom, please write:

“The material presented in this work was carried out in part in the Micro-Nano-Mechanical Systems Cleanroom Laboratory within the Department of Mechanical Science and Engineering at the University of Illinois.”

  • Jiho Shin, Zhonghe Liu, Wubin Bai, Yonghao Liu, Ying Yan, Yeguang Xue, Irawati Kandela, Maryam Pezhouh, Matthew R. MacEwan, Yonggang Huang, Wilson Z. Ray, Weidong Zhou, and John A. Rogers. Bioresorbable optical sensor systems for monitoring of intracranial pressure and temperature. From AAAS & ScienceMag, 2019.

  • Kulkarni, A. A., Kohanek, J., Hanson, E., Thornton, K. & Braun, P. V. Control of lamellar eutectic orientation via template-directed solidification. Acta Materialia 166, 715–722 (2019).

  • Mohamed Elhebeary, Bashar Emon, Onur Aydin, and M. Taher A. Saif. A Novel Technique for In-situ Uniaxial Tests of Selfassembled Soft Biomaterials. Author Manuscript from RSC, 2019. 

  • J. Li, E. Song, C. H. Chiang, K. J. Yu, J. Koo, H. Du, Y. Zhong, M. Hill, C. Wang, J. Zhang, Y. Chen, L. Tian, Y. Zhong, G. Fang, J. Viventi, and J. A. Rogers. Conductively coupled flexible silicon electronic systems for chronic neural electrophysiology. From PNAS Publishing, 2018.

  • Jan-Kai Chang, M. A. Bashar Emon, Chia-Shuo Li, Quansan Yang, Hui-Ping Chang, Zijian Yang, Chih-I Wu, M. Taher Saif, and John A. Rogers. Cytotoxicity and in Vitro Degradation Kinetics of Foundry-Compatible Semiconductor Nanomembranes and Electronic Microcomponents. From ACS Nano, 2018.

  • Jan-Kai Chang, Hui Fang, Christopher A. Bower, Enming Song, Xinge Yu, and John A. Rogers. Materials and processing approaches for foundry-compatible transient electronics. From PNAS Publishing, 2017.

  • Neil A. Krueger, Aaron L. Holsteen, Seung-Kyun Kang, Christian R. Ocier, Weijun Zhou, Glennys Mensing, John A. Rogers, Mark L. Brongersma, and Paul V. Braun. Porous Silicon Gradient Refractive Index Micro-Optics. From ACS Publications, 2016.

  • Vikhram V. Swaminathan, Mark A. Shannon & Rashid Bashir. Enhanced sub-micron colloidal particle separation with interdigitated microelectrode arrays using mixed AC/DC dielectrophoretic scheme. From Biomedical Microdevices, 2015.

  • Lopez-Montesinos, P. O., Desai, A. V. & Kenis, P. J. A. A three-dimensional numerical model of a micro laminar flow fuel cell with a bridge-shaped microchannel cross-section. Journal of Power Sources 269, 542–549 (2014).

  • Ali Ashraf, Yanbin Wu, Michael C. Wang, Narayana R. Aluru, Seyed A. Dastgheib, and SungWoo Nam. Spectroscopic Investigation of the Wettability of Multilayer Graphene Using Highly Ordered Pyrolytic Graphite as a Model Material. From, 2014.

  • Huan Hu, Vikhram V. Swaminathan, Mahmoud Reza Zamani Farahani, Glennys Mensing, Junghoon Yeom, Mark A. Shannon, and Likun Zhu. Hierarchically structured re-entrant microstructures for superhydrophobic surfaces with extremely low hysteresis. From IOP Publishing, 2014.

  • Chandra Nath, Lingyun Jian, Johnson Samuel, and Shiv G. Kapoor. Estimating the Cohesive Zone Model Parameters of Carbon Nanotube–Polymer Interface for Machining Simulations. Journal of Manufacturing Science and Engineering, 2014

  • Jiang, L., Nath, C., Samuel, J. & Kapoor, S. G. Estimating the Cohesive Zone Model Parameters of Carbon Nanotube–Polymer Interface for Machining Simulations. J. Manuf. Sci. Eng 136, 031004-031004–8 (2014).

  • Hairong Li, Haiying Zhou, Stephanie Krieger, Jesse J. Parry, Joseph J. Whittenberg, Amit V. Desai, Buck E. Rogers, Paul J. A. Kenis, and David E. Reichert. Triazine-Based Tool Box for Developing Peptidic PET Imaging Probes: Syntheses, Microfluidic Radiolabeling, and Structure−Activity Evaluation. From ACS Publications, 2014. 

  • Hairong Li, Joseph J. Whittenberg, Haiying Zhou, David Ranganathan, Amit V. Desai, Jan Koziol, Dexing Zeng, Paul J. A. Kenis and David E. Reichert. Development of a microfluidic “click chip” incorporating an immobilized Cu(I) catalyst. From RSC Advances, unpublished.

  • Sachit Goyal. Microfluidic platforms for solid form screening of pharmaceutical parent compounds. From Proquest Dissertations Publishing, 2014.

  • Sachit Goyal, Amit V. Desai, Robert W. Lewis, David R. Ranganathan, Hairong Li, Dexing Zeng, David E. Reichert, and Paul J.A. Kenis. Thiolene and SIFEL-based Microfluidic Platforms for Liquid-Liquid Extraction. Author Manuscript, 2013.

  • Christopher J. Corcoran, Somi Kang, Lanfang Li, Xiaoying Guo, Debashis Chanda, and Ralph G. Nuzzo. Mechanisms of Enhanced Optical Absorption for Ultrathin Silicon Solar Microcells with an Integrated Nanostructured Backside Reflector. From ACS Applied Materials & Interfaces vol. 5 no. 10, 2013.

  • Ashraf, A., Dastgheib, S. A., Mensing, G. & Shannon, M. A. Surface characteristics of selected carbon materials exposed to supercritical water. The Journal of Supercritical Fluids 76, 32–40 (2013).

  • Vikhram V. Swaminathan, Spandana Gannavaram, Shihui Li, Huan Hu, Junghoon Yeom, Yong Wang, and Likun Zhu. Microfluidic Platform with Hierarchical Micro/Nanostructures and SELEX Nucleic Acid Aptamer Coating for Isolation of Circulating Tumor Cells. From IEEE Nano, 2013.

  • Yao, C. W. et al. Droplet contact angle behavior on a hybrid surface with hydrophobic and hydrophilic properties. Appl. Phys. Lett. 101, 111605 (2012).

  • Tang, X., Ali, M. Y. & A. Saif, M. T. A novel technique for micro-patterning proteins and cells on polyacrylamide gels. Soft Matter 8, 7197–7206 (2012).

  • Timothy P. Garvin. Fabrication, Characterization, and Wettability Analysis of a Microstructured Hybrid Hydrophobic/Hydrophilic Surface. From The United States' DTIC, 2012.

  • Vikhram V. Swaminathan, Likun Zhu, Bogdan Gurau, Richard I. Masel & Mark A. Shannon. Integrated micro fuel cell with on-demand hydrogen production and passive control MEMS. Microfluidics and Nanofluidics 12, 735-749, 2012.

  • Kamlesh D. Patel. High-Density Nanopore Array for Selective Biomolecule Transport. From Sandia National Laboratories, 2011.

  • L. Zhu, N. Kroodsma, J. Yeom, J. L. Haan, M. A. Shannon & D. D. Meng. An on-demand microfluidic hydrogen generator with self-regulated gas generation and self-circulated reactant exchange with a rechargeable reservoir. From Microfluidics and Nanofluidics no. 569, 2011.

  • López-Montesinos, P. O. et al. Design, fabrication, and characterization of a planar, silicon-based, monolithically integrated micro laminar flow fuel cell with a bridge-shaped microchannel cross-section. Journal of Power Sources 196, 4638–4645 (2011).

  • Patrick C. Fletcher. Electro-thermal nanoprobes for nanometrology and nanofabrication. From Proquest Dissertations Publishing, 2011.

  • Andrew H Cannon and William P King. Casting metal microstructures from a flexible and reusable mold. From JOP Publishing, 2009.

  • L. Zhu, D.D. Meng, N. Kroodsma, J. Yeom, and M.A. Shannon. An Integrated Microfluidic Self Regulating and Self Circulating Hydrogen Generator for Fuel Cells. From IEEE, 2009.

  • Jeahyeong Han and Mark A. Shannon. Smooth Contact Capacitive Pressure Sensors in Touch - and Peeling - Mode Operation. From IEEE Sensors Journal vol. 9 no. 3, 2009

  • Vikhram V. Swaminathan, L. Zhu, B. Gurau, R.I. Masel and M.A. Shannon. A Micro-Hydrogen Generator with a Microfluidic Self Regulating Valve for Sensors and Fuel Cells. From IEEE, 2009. 

  • Natalya L. Privorotskaya. Microcantilever sensors for biochemical detection and analysis. From Proquest Dissertations Publishing, 2009.

  • L. Zhu, K.Y. Lin, R.D. Morgan, Vikhram V. Swaminathan, H.S. Kim, B. Gurau, D. Kim, B. Bae, R.I. Masel, and M.A. Shannon. Integrated micro-power source based on a micro-silicon fuel cell and a micro electromechanical system hydrogen generator. From Journal of Power Sources issue 185, 2008.

  • Shaurya Prakash, Aigars Piruska, Enid N. Gatimu, Paul W. Bohn, Jonathan V. Sweedler, and Mark A. Shannon. Nanofluidics: Systems and Applications. From IEEE Sensors Journal Vol. 8 No. 5, 2008. 

  • Mark A. Shannon and Raphael Semiat. Advancing Materials and Technologies for Water Purification. From MRS Bulletin Volume 33 Issue 1, 2008.

  • Yongfang Zhong. Condensation and freezing front propagation on surfaces with topographic and chemical modifications. From Proquest Dissertations Publishing, 2008.

  • Byunghoon Bae, Jeahyeong Han, Richard I. Masel, and Mark A. Shannon. A Bidirectional Electrostatic Microvalve With Microsecond Switching Performance. From the Journal of Microelectromechanical Systems vol. 16 no. 6, 2007.

  • Junghoon Yeom. Fabrication, characterization, and transport analysis of silicon-based microsystems: Micro fuel cells and micro gas perconcentrators. From Proquest Dissertations Publishing, 2007.