AFM (Dimension 3000)
This tool has fast scanning capabilities in air, closed-loop, high precision scanner, and can scan on either Tapping mode, Contact mode, and STM mode.
- Maximum lateral scan size is 90 µm × 90 µm,
- Maximum vertical range is 5 µm
- Vertical resolution down to 5-10 nm
- The X-Y stage has 100 mm by 120 mm inspectable area
- Maximum Substrate Size: 8-inch diameter and 0.5 inch thick