Profilometer - KLA-TENCOR Alpha D500
The profilometer measures vertical depths/heights and horizontal widths using a probe tip that is slowly dragged along a samples surface. It is set up on a vibration isolation table to reduce noise, which can affect the minimum height and resolution. Analysis of the scan can be performed using the software measuring profiles, roughness/waviness, and the step height.
Sample Size: up to 8" (200mm) diameter
Substrate thickness: 1.18" (30mm)
Tip: KLA 0520216-001
- Diameter: 5um
- Radius: 60°
- Shape: cone
- Bevel height: 880um
Vertical Features: 10A to 1mm max
Vertical Resolution: 1A for 2.5u range to 100nm for 1.2mm range
Scan Speeds: 10-400um/s
Max Scan Length: 30mm/s