University of Illinois Urbana-Champaign

Mechanical Science and Engineering

Micro-Nano-Mechanical Systems Cleanroom Laboratory

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SEM - Oxford INCA EDS Detector...

SEM - Oxford INCA EDS Detector on Hitachi S-2250N

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Micro-Nano-Mechanical Systems Cleanroom Laboratory

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2208 Sidney Lu Mechanical Engineering Building

1206 W Green St

Urbana, IL 61801

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Email: mnms-director@illinois.edu

Mechanical Science and Engineering

The Grainger College of Engineering

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