Microlight 3D - Maskless Aligner and Exposure Tool
This tool does maskless lithography with top side alignment.
- Minimum feature size is 1.5um,
- File types include
- Images: tif, jpg, png, bmp
- CAD files: gds, oas, dxf, cif
- Wavelength: 385nm
- Maximum Substrate Size: 5 in x 5 in
The tool uses KLayout to convert drawings into images for DMD projection onto the sample. Klayout is a free software users can download to design mask patterns.
The tool is characterized for use with SPR220-4.5, but other resists can be characterized as needed.