MNMS Cleanroom

Research in the design and fabrication of small-scale mechanical systems

MNMS Cleanroom

Research in the design and fabrication of small-scale mechanical systems

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MNMS Cleanroom

Research in the design and fabrication of small-scale mechanical systems

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About the Micro-Nano-Mechanical Systems Cleanroom Laboratory

The Micro-Nano-Mechanical Systems Cleanroom Laboratory within the Department of Mechanical Science and Engineering at the University of Illinois provides an opportunity for research and discovery that is otherwise unattainable in a typical laboratory setting. If you have any questions or concerns, please email the MNMS Director (mnms-director@illinois.edu).

To request staff assisted Cleanroom services and research, contact Lab Coordinator, Glennys Mensing, at gmensing@illinois.edu or 217-333-5694.

Description of Services

MNMS Cleanroom Staff are available for device fabrication research and development. This can include fabrication approach suggestions, or direct manufacturing and testing. The majority of fabrication done by Staff is done using MNMS Cleanroom Equipment, however the Staff will use other equipment on campus as necessary.

Description of Facilities

The Micro-Nano Mechanical Systems (MNMS) Laboratory is a 3800 sq. ft suite of labs and related support rooms, including 3 cleanroom laboratories for research in the design and fabrication of small-scale mechanical systems. The lab supports research and instruction in the general area of micro- and nano-electro-mechanical systems (MEMS & NEMS), and nano-chemical-electrical-mechanical-manufacturing systems (Nano-CEMMS). The current focus is on devices employing nano-to-microscale mechanisms and the integration of these mechanisms into meso-scale devices.

The MNMS laboratory has class 1000, 100 and 10 cleanrooms for the microfabrication, inspection, and testing of devices. The cleanrooms house a range of state-of-the-art equipment including:

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Equipment

Lithography

Etching

Deposition

Analysis

General

University of Illinois Designed Equipment

In addition to the cleanroom laboratories, the MNMS laboratory has a preparation room for lapping, dicing, ultrasonic milling, and sample preparation. A chemical fume hood and Scanning Electron Microscope (SEM) are also available.

Featuring Class 100 and 10 cleanrooms for the microfabrication, inspection, and testing of devices, the facility houses a range of state-of-the-art equipment for lithography, etching, deposition, and analysis including an EV Group mask aligner system, SPTS inductively coupled plasma deep reactive ion etching tool, AJA Sputtering system, and KLA Tencor profilometer to name a few.

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