Wet benches and photolithography under filtered light
Contact lithography up to 0.5um resolution
Photolithography in Class100 Cleanroom
About the Micro-Nano-Mechanical Systems Cleanroom Laboratory
The Micro-Nano-Mechanical Systems Cleanroom Laboratory within the Department of Mechanical Science and Engineering at the University of Illinois provides an opportunity for research and discovery that is otherwise unattainable in a typical laboratory setting. If you have any questions or concerns, please email the MNMS Director (firstname.lastname@example.org).
To request staff assisted Cleanroom services and research, contact Assistant Director, Glennys Mensing, at email@example.com or 217-333-5694.
Check out our Wiki page
Description of Services
MNMS Cleanroom Staff are available for device fabrication research and development. This can include fabrication approach suggestions, or direct manufacturing and testing. The majority of fabrication done by Staff is done using MNMS Cleanroom Equipment, however the Staff will use other equipment on campus as necessary.
Description of Facilities
The Micro-Nano Mechanical Systems (MNMS) Laboratory is a 3800 sq. ft suite of labs and related support rooms, including 3 cleanroom laboratories for research in the design and fabrication of small-scale mechanical systems. The lab supports research and instruction in the general area of micro- and nano-electro-mechanical systems (MEMS & NEMS), and nano-chemical-electrical-mechanical-manufacturing systems (Nano-CEMMS). The current focus is on devices employing nano-to-microscale mechanisms and the integration of these mechanisms into meso-scale devices.
The MNMS laboratory has class 1000, 100 and 10 cleanrooms for the microfabrication, inspection, and testing of devices. The cleanrooms house a range of state-of-the-art equipment including:
- Bonder - EVG 501 Wafer Bonding System
- Carrier Wafer Mounting Chuck
- Cleaving tool by LatticeGear
- Dicing Saw
- Electroplating Station
- Fume Hood - Acid - Hydrofluoric Acid Use
- Fume Hood - Prep Room
- Lapping System
- Oven - Curing Oven
- Oven - Vacuum Annealer
- Oven - Vacuum Oven
- Sonic Mill
- Spinner (Left)
- Spinner (Right)
- Supercritical Point Dryer
- Tube Furnace - Anneal Tube
- Tube Furnace - Boron Tube
- Tube Furnace - Dirty Tube
- Tube Furnace - Oxidation Tube
- Tube Furnace - Phosphorus Tube
- Ultrasonic Cleaner
University of Illinois Designed Equipment
In addition to the cleanroom laboratories, the MNMS laboratory has a preparation room for lapping, dicing, ultrasonic milling, and sample preparation. A chemical fume hood and Scanning Electron Microscope (SEM) are also available.